Announcing the debut of the DWR1720 deionized water recycling unit for dicing saws that totally eliminates water waste
DISCO Corporation (Headquarters: Ohta-ku, Tokyo; President: Hitoshi Mizorogi) has developed the DWR1720, a super-compact deionized water recycling unit, which totally eliminates the waste of water from dicing saws. It will be on display at the SEMICON Japan 2008 trade show scheduled to be held this December.
Development backgroundIn recent years, the volume of deionized water used by dicing saws for processing operations has been on the rise in order to improve the cleaning of wafers, and there has been a growing need to recycle this water as well. However, the recycling systems that have been available to date are generally large in scale and high in cost. To overcome these problems, DISCO developed the DWR1720, designed to have a much smaller footprint, to achieve a significantly higher deionized water-recycling rate, and to conserve energy by lowering the power consumption compared with existing systems.
Overview of the DWR1720
<High environmental performance realized>
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Use of the newly developed "CC Filters" ensures that the wasted water from dicing saw operations is totally eliminated (99.8 of the water is recycled, and 0.2 is released as vapor).
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The system incorporates a water temperature adjustment function that keeps the deionized water at a constant temperature, replacing the previously required water temperature control unit, necessitating no increase in the floor space used in clean rooms. (In fact, the system's footprint of 0.6 square meters [450 x 1,302 mm] is identical to that of the DTU152 water temperature control unit.)
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The new system's power consumption has been significantly reduced when compared with that of a conventional deionized water recycling system and a water temperature control unit combined.
<High level of maintainability>
Maintenance is easily carried out because the filtered suspended matter (e.g., cutting debris) can simply be discarded along with the CC Filters, thereby eliminating the large-scale facilities which required reconstitution using filtering devices and aggregation using solvents that were needed in the past.
<All processes from production to recycling of deionized water achieved in one system>
All the functions previously performed by individual units--whether deionized water production, water temperature control, or waste-water filtering (removal of suspended matter)--are now achieved with a single device.
<Efficient introduction to plant facilities>
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Efficient introduction to facilities can be now possible to meet the number of dicing saws in operation (one DWR1720 system can support two dicing saws).
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Since the equipment is installed together with the dicing saws, there is no need for large-scale piping construction; other aspects of its installation are also easier to accomplish compared with existing deionized water-recycling equipment.
Schedule
December 2008
System will be showcased at SEMICON Japan
April 2009
Sales of the equipment will commence
Contact:
Aya Osumi
Corporate Communications
DISCO Corporation
E-Mail:
Phone: 81-3-4590-1090
