Product Information

DISCO's accessory units help maintain and improve the precision and accuracy of DISCO's dicers, grinders, and polishers.

Deionized Water Recycling Unit

Water Temperature Control Unit

Resistivity Management Unit

Automatic Cleaning System

Deionized Water Recycling Unit	DWR1720	Deionized water recycling unit combines the capabilities of producing deionized water, controlling the water temperature, filtering, and waste water treatment in a single unit.
Water Temperature Control Units	DTU152	For Silicon wafer cutting / Wheel coolant flushing method
	DTU1531	For Silicon wafer cutting / Wheel coolant flushing method
	DTU162	For Electronic components cutting / Wheel coolant circulating method
Resistivity Management Unit	CO₂ Injector	Prevent particle adhesion and device damage caused by static electricity.
Automatic Cleaning System	DCS1440	For silicon wafer, glass board or ceramic workpiece cleaning
	DCS1460
	DCS141*