Product Information

ZH05 Series

The high-precision grit concentration control of the ZH05 Series allows for extremely stable and consistent process results.

	Newly developed grit concentration control technology has made possible five distinct levels of grit concentration. This wider range of choices offers improved balance between blade life and process quality (in particular, backside chipping).
	Hub blade handling safety sheet

Features

5 grit concentration levels support diverse applications.
The ZH05 Series offers shorter precut times and lower chance of blade breakage due to fl ying die.

Concentration range

"Grit concentration" refers to the percentage of diamond grit in the abrasive portion of the blade. For example, a grit concentration level of 100 indicates 25% diamond grit by volume. During dicing, grit concentration affects both the speed of blade wear and the size of chipping. By selecting precisely a grit concentration that is appropriate to the application, both wear rate and process quality can be made more stable and consistent.

Applicable Workpieces

Silicon, GaAs, GaP, LiTaO3, etc.

Applicable Machines

6000 Series and 600 Series fully automatic dicing saws
3000 Series, 300 Series, and 500 Series automatic dicing saws

Specifications

		Kerf Width / Actual thickness
	*1 Can be manufactured to produce a maximum kerf width of 0.2 mm

	Standard sizes^2 2 Please contact a DISCO representative for details.

	Standard concentrations

Experimental Data

By increasing the concentration options for ZH05, it is possible to precisely respond to customer needs. It also has the potential to shorten the precut time.

Relationship of blade wear to backside chipping