Used with polishers to provide stress relief for silicon, compound semiconductors, and a wide variety of other materials. DISCO's dry polishing wheels provide excellent Migaku processing without chemicals, slurry, or water.
Newly developed dry polishing wheels. In addition to usual wafer polishing, these can also be used in the DBG process.
Series
Application
Feature
DP
Series
Silicon, etc.
No chemicals, slurry, or water, employs a special non-diamond grit to impart a mirror finish to silicon and other semiconductor materials for excellent stress relief.
