| |
DFG8540
 |
DFG8560
|
 |
|
|
| Wafer Diameter |
Max ø 8" (ø 4" - ø 8") |
Max ø 300 (ø 8" - ø 12") |
| Models |
2-spindles, 3-rotary-chuck table |
| Application |
Ultra-thin grinding (100 ｵm or less) |
| Grinding Method |
In-feed grinding with wafer rotation |
| Spindle |
Type |
Air bearing with high frequency motor |
| Number of axes |
2 |
| Output（kW） |
4.2 |
4.8 |
| Revolution speed(min-1)[rpm] |
1,000 - 7,000 |
1,000 - 4,000 |
| Z-axis vertical stroke(mm) |
120 (with zero point) |
Z-axis vertical grinding feed speed
(mm/s) |
0.0001 - 0.08 |
| Z-axis vertical fast feed speed(mm/s) |
50 |
| Min. Z-axis vertical movement(um) |
0.1 |
| Min. Z-axis vertical movement resolution(um) |
0.1 |
| Height Gauge |
Measurement range(um) |
0 - 1,800 |
| Resolution(um) |
0.1 |
| Repeatability(um) |
±0.5 |
| Wafer Chuck Table |
Chuck table type |
Porous chuck table |
| Chuck method |
Vacuum |
| Number of revolutions |
0 - 300 |
| Number of chuck tables |
3 |
| Chuck table cleaning |
Backflushing of water and compressed
air is combined with oilstone cleaning and brush cleaning |
| Spark Out (chuck table revolutions setting) |
0 - 999 |
| Grinding Wheel |
Diamond wheel(mm) |
ø 200 |
ø 300 |
| Wafer Handling Section / Wafer Cleaning
Section |
Cassette storage quantity |
2 |
| Cassette flow |
Same flow and open flow |
| Spinner unit |
Water washing and drying |
| Vacuum Unit |
Discharge speed |
29/36 (m3/h) 50/60 (Hz) |
| Achievable pressure(kPa·G) |
-90 (water supply temperature 15ｰC,
water supply flow rate 1L/min) |
| Electric motor（kW） |
1.5 |
| Water flow rate（L/min） |
When supplied water temperature is
greater than 22ｰC : 3
When supplied water temperature is less than 22ｰC : 1 |
| Grinding Accuracy |
Thickness variation within one wafer(um) |
less than 1.5 (when grinding ・8" wafers
with included chuck tables) |
| Thickness variation between wafers(um) |
less than ±3 |
| Finish surface roughness(um) |
Ry 0.13 (with #2000finish)
Ry 0.15 (with #1400finish) |
Machine dimensions
(W x D x H) (mm) |
1,200 x 2,670 x 1,800 |
1,400 x 3,322 x 1,800 |
| Machine weight (kg) |
Approx. 3,100 |
Approx. 4,000 |
