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DISCO HOME > Product Information > Grinding Wheels > GF01 Series BT100

Product Information


GF01 Series BT100

GF01 Series BT100 Catalog
BT100, a newly developed resin bond for rough grinding wheels, offers ultra-high grinding quality.
Grinding Wheel GF01 Series BT100, a newly developed bond for rough grinding wheels, supports wheel life comparable to that of standard vitrifed bond. At the same time, BT100 helps reduce edge chipping and grinding damage, making it an ideal for use in ultra-thin grinding.

Features
  • Newly developed resin bond offers ultra-high grinding quality.
  • Life comparable to that of standard vitrifi ed bond wheels.
  • Consistent and highly precise grinding results.
  • New wheel base (GF01) offers highly effective delivery of coolant water.

Wheel comparison

Applicable Workpieces
Silicon wafer and others.

Applicable Machines
DAG800 Series, DFG800 Series and DFG8000 Series grinders DGP8000 Series polishers

Specifications

Note: Due to ongoing research and development, product specification is subject to change without notice.

Comparative Data with Previous Wheels
With the increase in ultra-thin grinding applications for silicon, in recent years there has been a need for process quality improvements during the rough grinding stage, including reduced edge chipping and grinding damage layers. In response, DISCO has added to the GF01 Series wheel lineup the BT100 bond, which features extremely high grinding quality while comparable to that of standard vitrified bond.

Edge chipping


Workpiece : ø8" sillicon mirror wafer x 3
Final thickness : 100 µm
Z2 removal amount : 20 µm
Z2 wheel : IF-01-1-4/6-B-K09


GF01-SD320-BT100 x100

IF-01-1-40/60-VS x100

Sub surface damage


Workpiece : ø8" silicon mirror wafer x 1
Final thickness : 400 µm


GF01-SD320-BT100 x200

IF-01-1-40/60-VS x200
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