7000 Series - Fully Automatic Laser saw -
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The 7000 Series Laser Saw performs loading, alignment, laser processing (Full cutting, grooving and inner-modifying process), cleaning, drying and unloading with just the touch of a button. The Laser Saw features a short-pulse ultraviolet laser that processes workpieces with virtually no heat. In addition, the LCD touch panel with dicer-based graphical user interface makes operation easy to master.
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Laser processing method introduction |
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| Process method where solids can be vaporized or sublimated by focusing laser energy on a extremely small area for a short time. |
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| This is a dicing method that forms a modified layer in the workpiece, by focusing a laser inside the workpiece, and then implements die separation with a machine such as a tape expander. |
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DFL7160
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DFL7260
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| Models |
ø300 mm wafer, ablation processing compliant laser saw |
ø300 mm wafer, ablation processing compliant two-head laser saw |
| Max. Workpiece Size (mm) |
ø300 mm |
Max. Applicable
tape frame size |
2-12 |
X-axis
(Chuck table) |
Processing range (mm) |
310 |
| Max. processing speed (mm/s) |
600 |
1,000 |
Y-axis
(Chuck table) |
Processing range (mm) |
310 |
| Index step (mm) |
0.0001 |
| Index positioning accuracy |
0.003/310
(Single error) 0.002/5 |
| Scale resolution (mm) |
0.0001 |
0.00005 |
| Z-axis |
Input range for lens height (mm) |
-2,000 to 5,000 |
| Moving resolution (mm) |
0.00005 |
| Repeatability accuracy (mm) |
0.002 |
θ-axis
(Chuck table) |
Max. rotating angle (deg.) |
380
(320° in the positive (+) direction and 60° in the nagative (-) direction from the initial position) |
380
(245° in the positive (+) direction and 135° in the negative (-) direction from the initial position) |
| Laser Oscillator |
Oscillator Model |
Semicondutor laser diode (LD) excitation Q-switch
solid laser |
Semicondutor laser diode (LD) excitation Q-switch solid laser x 2 |
Machine dimensions
(W x D x H) (mm) |
1,200 x 1,550 x 1,800 |
2,800 x 1,220 x 1,800 |
| Machine weight (kg) |
Approx. 1,750
(without transformer)
Approx. 1,870
(with transformer) |
2,900
(ncluding UPS) |
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DFL7260
A chiller unit is placed outside the machine. 1200 x 650 x 1558 mm (chiller unit dimensions) |
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The above specifications may change due to technical modifications. Please confirm when placing
your order.
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