Cutting Water Additives for Dicing - StayClean-F -
Pad corrosion protection
By forming a barrier layer on the workpiece surface, the StayClean-F protects workpieces including large diameter wafers and small die which will be exposed to cutting water for a long time from corroding at a metal area such as bonding pad.
< The effect on pad corrosion prevention >
DI water only
When using StayClean-F
Particle adhesion prevention
In addition to forming a barrier layer on the workpiece surface, by preventing Si particles from aggregation, the adhesion of particles to a wafer can be avoided.