Solutions

Applications Example

High Quality Processing of InP (Indium Phosphide)

Optimization of wheels and processing parameters enables high quality processing of InP (indium phosphide) used in high-speed devices.

Selection of optical processing parameters improves the condition of the processed surface compared with the existing method.

Before the improvement	After the improvement

Figure 1: Microscope Images of the Processed Surface

Reference: Surface Roughness after Processing a 3-inch InP Wafer
(After Optimizing the Processing Parameters)

Surface roughness Ra: 0.004 µm

Surface roughness Ry: 0.033 µm